A flexible, distributed architecture for semiconductor process control and experimentation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2912, Issue , 1997, Pages 146-158

  Gower, Aaron E ^a   Boning, Duane S ^a   McIlrath, Michael B ^a  

^a Department of Electrical Engineering and Computer Science   (United States)

Author keywords

Distributed architecture; Distributed interface; In situ data acquisition; Semiconductor process control

Indexed keywords

ARCHITECTURE; CHARGE COUPLED DEVICES; COMPUTER ARCHITECTURE; CONTROL SYSTEMS; CONTROL THEORY; DIGITAL CAMERAS; ELECTRIC CONDUCTIVITY; ETCHING; FABRICATION; FEEDBACK; FEEDBACK CONTROL; IMAGE ENHANCEMENT; INFORMATION RETRIEVAL SYSTEMS; MERGERS AND ACQUISITIONS; OPEN SYSTEMS; PLASMA ETCHING; PLASMAS; QUALITY CONTROL; ROBUST CONTROL; SECURITY OF DATA; SEMICONDUCTING INDIUM; SEMICONDUCTOR MATERIALS; SENSORS;

ADVANCED RESEARCHES; ALGORITHMIC CONTROLLERS; APPLIED MATERIALS; ARCHITECTURAL COMPONENTS; CCD SENSORS; CONTROL DECISIONS; CONTROLLED PROCESSES; DIRECT LINKS; DISTRIBUTED ARCHITECTURE; DISTRIBUTED INTERFACE; FEEDBACK CONTROL ALGORITHMS; FLEXIBLE ARCHITECTURES; HOST CONTROLLERS; IN-SITU DATA ACQUISITION; INTEGRATED SETS; PREDEFINED SETS; PROCESSING EQUIPMENTS; REMOTE COMMUNICATIONS; REMOTE USERS; SEMICONDUCTOR FABRICATIONS; SEMICONDUCTOR PROCESS CONTROL; SOFTWARE COMPONENTS; SOFTWARE PLATFORMS; SYSTEM ARCHITECTURES; SYSTEM SERVERS; SYSTEM SUPPORTS; TCP/IP SOCKETS;

PROCESS CONTROL;

EID: 58049158298     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.263364     Document Type: Conference Paper

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