Internet remote microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2901, Issue , 1996, Pages 90-100

  Kao, James ^a   Troxel, Donald E ^a   Kittipiyakul, Somsak ^a  

^a USA   (United States)

Author keywords

Conferencing; Inspection; Internet; Microscope; Remote; Telemicroscopy

Indexed keywords

COMPUTER CONTROL SYSTEMS; COMPUTER WORKSTATIONS; ELECTRIC CONDUCTIVITY; INDOOR AIR POLLUTION; INSTRUMENT CIRCUITS; INTEGRATED CIRCUITS; INTERFACES (COMPUTER); INTERNET; MICROSCOPES; PERSONAL COMPUTERS; SEMICONDUCTOR MATERIALS; VISUAL COMMUNICATION;

CLIENT INTERFACES; CONFERENCING; GRAPHICAL INTERFACES; REMOTE; REMOTE FABRICATIONS; REMOTELY CONTROLS; ROOM ENVIRONMENTS; SEMI-CONDUCTORS; SEMICONDUCTOR PROCESSING; SPECIAL HARDWARES; TELEMICROSCOPY; ZEISS MICROSCOPES;

INSPECTION;

EID: 58049089581     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.262999     Document Type: Conference Paper

References (10)

1. J. Kao, "Remote Microscope for Inspection of Integrated Circuits," S.M. Thesis, Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, September 1995.
2. J. Kwon, "The Remote Fabrication of Integrated Circuits," S.M. Thesis, Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, August 1995.
3. R. Weinstein, K. Bloom, S. Rozek, "Telepathology and the Networking of Pathology Diagnostic Services," Archives of Pathology & Laboratory Medicine, Vol. 111, No. 7, July 1987, p. 646-652.
4. R. Weinstein, K. Bloom, S. Rozek, "Telepathology, Long-Distance Diagnosis," American Journal of Clinical Pathology, April 1989, p. S39-42.
5. S. Batnitzky, S. Rosenthal, E. Siegel, L. Wetzel, "Teleradiology: An Assessment," Radiology, Vol. 177, No. 1, October 1990, p. 11-17.
6. M. Goldberg, S. Hassan, D. Rosenthal, S. Black-Schaffer, T. Flotte, R. Colvin, J. Thrall, "Making Global Telemedicine Practical and Affordable: Demonstrations from the Middle East," American Journal of Roentgenol, Vol 163, No. 6, Dec 1994, p. 1495-1599.
7. S. Kittipiyakul, "Automated Remote Microscope for Inspection of Integrated Circuits," S.M. Thesis, Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, September 1996.
8. R. Bishop, Operation Manual for Beltronics Automated Microscope System, Beltronics Corp, May 1996.
9. J. Carney, "An Implementation of a Layered Message Passing System," S.M. Thesis, Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, May, 1994.
10. J.K. Ousterhout, Tcl and the Tk Toolkit, Addison Wesley, Reading, MA, 1994.