MOS structures with amorphous tungsten trioxide for capacitive humidity sensors

Semiconductors

Volumn 42, Issue 13, 2008, Pages 1561-1563

  Tutov, E A ^a  

^a VORONEZH STATE UNIVERSITY   (Russian Federation)

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[No Author keywords available]

Indexed keywords

EID: 57949087148     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/S106378260813023X     Document Type: Article

References (10)

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10. S. J. Gregg and K. S. Sing, Adsorption, Surface Area, and Porosity (Academic Press, New York, 1982; Mir, Moscow, 1984).