Semiconductor manufacturing equipment data acquisition simulation for timing performance analysis

2008 IEEE International Symposium on Precision Clock Synchronization for Measurement, Control and Communication, ISPCS 2008, Proceedings

Volumn , Issue , 2008, Pages 77-82

  Li Baboud, Ya Shian ^a   Zhu, Xiao ^b   Anand, Dhananjay ^b   Hussaini, Sulaiman ^b   Moyne, James ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Data acquisition; Data quality; Equipment data acquisition standard; Semiconductor manufacturing; Time synchronization

Indexed keywords

CLOCKS; CONTROL SYSTEM ANALYSIS; CONTROL SYSTEMS; CONTROL THEORY; DATA ACQUISITION; ELECTRIC CONDUCTIVITY; EQUIPMENT; INDUSTRIAL APPLICATIONS; MANUFACTURE; MECHANICAL CLOCKS; MERGERS AND ACQUISITIONS; PROCESS CONTROL; REAL TIME SYSTEMS; SEMICONDUCTOR MATERIALS; STAMPING; SYNCHRONIZATION;

CLOCK SYNCHRONIZATIONS; CONFIGURABLE; DATA COLLECTIONS; DATA QUALITY; EQUIPMENT DATA ACQUISITION STANDARD; EQUIPMENT EFFICIENCIES; HETEROGENEOUS SOURCES; PROCESS DATUMS; SEMICONDUCTOR MANUFACTURING; TIME PROCESSES; TIME SYNCHRONIZATION; TIMING PERFORMANCES; TRACE DATUMS;

DATA COMMUNICATION EQUIPMENT;

EID: 57849154023     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISPCS.2008.4659217     Document Type: Conference Paper

References (8)

1. Kalappa, N., Moyne, J., Parrott, J. and Li, Y. "Practical Aspects Impacting Time Synchronization Data Quality in Semiconductor Manufacturing," Proceedings of AEC/APC Symposium, October 2006.
2. Parker, J., Reath, M., Krauss, A.F., Campbell, W.J. "Monitoring and Preventing Arc-Induced Wafer Damage in 300mm Manufacturing," 2004 International Conference on Integrated Circuit Design and Technology, p.131-134.
3. Anandarajah, V., Kalappa, N., Sangole, R., Hussaini, S., Li, Y., Baboud, J., and Moyne, J. "Precise Time Synchronization in Semiconductor Manufacturing," 2007 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, p.78-84.
4. SEMI E120 Common Equipment Model Specification
5. SEMI E125 Equipment Self Description Specification
6. SEMI E132 Equipment Client Authentication and Authorization Specification
7. SEMI E134 Data Collection Specification
8. Wireshark website: http://www.wireshark.org