Barrier Layers: Principles and applications in microelectronics

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 2, Issue 2, 1984, Pages 273-280

  Wittmer, Marc ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 57849122054     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.572580     Document Type: Article

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