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Volumn , Issue , 2008, Pages 278-285

Large-scale atomistic approach to random-dopant-induced characteristic variability in nanoscale CMOS digital and high-frequency integrated circuits

Author keywords

Device variability; Digital circuit; Fluctuation; High frequency circuit; Random dopant; Timing

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER AIDED DESIGN; DIGITAL CIRCUITS; DIGITAL INTEGRATED CIRCUITS; DOPING (ADDITIVES); INTEGRATED CIRCUITS; MOS CAPACITORS; MOSFET DEVICES; NETWORKS (CIRCUITS); RANDOM PROCESSES; TIME MEASUREMENT; TIMING CIRCUITS;

EID: 57849100078     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICCAD.2008.4681586     Document Type: Conference Paper
Times cited : (16)

References (33)
  • 1
    • 21644445541 scopus 로고    scopus 로고
    • D. M. Fried, J. M. Hergenrother, A. W. Topol, L. Chang, L. Sekaric, J. W. Sleight, S. McNab, J. Newbury, S. Steen, G. Gibson, Y. Zhang, N. Fuller, J. Bucchignano, C. Lavoie, C. Cabral, D. Canaperi, O. Dokumaci, D. Frank, E. Duch, I. Babich, K. Wong, J. Ott, C. Adams, T. Dalton, R. Nunes, D. Medeiros, R. Viswanathan, M. Ketchen, M. Ieong, W. Haensch, and K. W. Guarini, Aggressively scaled (0.143 μm2) 6T-SRAM cell for the 32 nm node and beyond, in Int. Electron Devices Meeting Tech. Dig., pp. 261-264, Dec. 2004.
    • D. M. Fried, J. M. Hergenrother, A. W. Topol, L. Chang, L. Sekaric, J. W. Sleight, S. McNab, J. Newbury, S. Steen, G. Gibson, Y. Zhang, N. Fuller, J. Bucchignano, C. Lavoie, C. Cabral, D. Canaperi, O. Dokumaci, D. Frank, E. Duch, I. Babich, K. Wong, J. Ott, C. Adams, T. Dalton, R. Nunes, D. Medeiros, R. Viswanathan, M. Ketchen, M. Ieong, W. Haensch, and K. W. Guarini, "Aggressively scaled (0.143 μm2) 6T-SRAM cell for the 32 nm node and beyond," in Int. Electron Devices Meeting Tech. Dig., pp. 261-264, Dec. 2004.
  • 7
    • 0035444824 scopus 로고    scopus 로고
    • RF Circuit Performance Degradation Due to Soft Breakdown and Hot-Carrier Effect in Deep-Submicrometer CMOS Technology
    • Sept
    • Q. Li, J. Zhang, Wei Li, J. S. Yuan, Yuan Chen, and Anthony S. Oates, "RF Circuit Performance Degradation Due to Soft Breakdown and Hot-Carrier Effect in Deep-Submicrometer CMOS Technology," IEEE Trans. Microwave Theory Tech., vol. 49, no. 9, pp. 1546-1551, Sept. 2001.
    • (2001) IEEE Trans. Microwave Theory Tech , vol.49 , Issue.9 , pp. 1546-1551
    • Li, Q.1    Zhang, J.2    Li, W.3    Yuan, J.S.4    Chen, Y.5    Oates, A.S.6
  • 8
    • 0032157146 scopus 로고    scopus 로고
    • Discrete Random Dopant Distribution Effects in Nanometer-Scale MOSFETs
    • Sept
    • H.-S. Wong, Y. Taur, and D. J. Frank, "Discrete Random Dopant Distribution Effects in Nanometer-Scale MOSFETs," Microelectronics Reliability, vol. 38, no. 9, pp. 1447-1456, Sept. 1999.
    • (1999) Microelectronics Reliability , vol.38 , Issue.9 , pp. 1447-1456
    • Wong, H.-S.1    Taur, Y.2    Frank, D.J.3
  • 9
    • 33749022999 scopus 로고    scopus 로고
    • Comparison of Random-Dopant-Induced Threshold Voltage Fluctuation in Nanoscale Single-, Double-, and Surrounding-Gate Field-Effect Transistors
    • Sept
    • Y. Li and S.-M. Yu, "Comparison of Random-Dopant-Induced Threshold Voltage Fluctuation in Nanoscale Single-, Double-, and Surrounding-Gate Field-Effect Transistors," Jpn. J. Appl. Phys., vol. 45, no. 9A, pp. 6860-6865, Sept. 2006.
    • (2006) Jpn. J. Appl. Phys , vol.45 , Issue.9 A , pp. 6860-6865
    • Li, Y.1    Yu, S.-M.2
  • 11
    • 34548282704 scopus 로고    scopus 로고
    • Electrical Characteristic Fluctuations in Sub-45nm CMOS Devices
    • Sept
    • F.-L. Yang, J.-R. Hwang, and Y. Li, "Electrical Characteristic Fluctuations in Sub-45nm CMOS Devices," in IEEE Custom Integrated Circuits Conf., pp. 691-694, Sept. 2006.
    • (2006) IEEE Custom Integrated Circuits Conf , pp. 691-694
    • Yang, F.-L.1    Hwang, J.-R.2    Li, Y.3
  • 12
    • 34248675792 scopus 로고    scopus 로고
    • Electrical characteristic fluctuations in 16nm bulk-FinFET devices
    • Sept.-Oct
    • Y. Li, and C.-H Hwang, "Electrical characteristic fluctuations in 16nm bulk-FinFET devices", Microelectronics Engineering, vol. 84, no. 9-10, pp.2093-2096, Sept.-Oct. 2007.
    • (2007) Microelectronics Engineering , vol.84 , Issue.9-10 , pp. 2093-2096
    • Li, Y.1    Hwang, C.-H.2
  • 13
    • 52649096841 scopus 로고    scopus 로고
    • Discrete-dopant-induced characteristic fluctuations in 16 nm multiple-gate silicon-on-insulator devices
    • Y. Li, and C.-H Hwang, "Discrete-dopant-induced characteristic fluctuations in 16 nm multiple-gate silicon-on-insulator devices", J. Appl. Phy., vol. 102, no. 8, 084509, 2007.
    • (2007) J. Appl. Phy , vol.102 , Issue.8 , pp. 084509
    • Li, Y.1    Hwang, C.-H.2
  • 14
    • 52649130153 scopus 로고    scopus 로고
    • A Coupled-Simulation-and-Optimization Approach to Nanodevice Fabrication With Minimization of Electrical Characteristics Fluctuation
    • Nov
    • Y. Li, and S.-M. Yu, "A Coupled-Simulation-and-Optimization Approach to Nanodevice Fabrication With Minimization of Electrical Characteristics Fluctuation," IEEE Trans. Semi. Manufacturing, vol. 20, no. 4, pp.432-438, Nov. 2007.
    • (2007) IEEE Trans. Semi. Manufacturing , vol.20 , Issue.4 , pp. 432-438
    • Li, Y.1    Yu, S.-M.2
  • 15
    • 34248662830 scopus 로고    scopus 로고
    • A study of threshold voltage fluctuations of nanoscale double gate metal-oxide-semiconductor field effect transistors using quantum correction simulation
    • July
    • Y. Li, and S.-M. Yu, "A study of threshold voltage fluctuations of nanoscale double gate metal-oxide-semiconductor field effect transistors using quantum correction simulation," J. Comp. Elect., vol. 5, no. 2-3, pp. 125-129, July 2006.
    • (2006) J. Comp. Elect , vol.5 , Issue.2-3 , pp. 125-129
    • Li, Y.1    Yu, S.-M.2
  • 16
    • 0032320827 scopus 로고    scopus 로고
    • Random Dopant Induced Threshold Voltage Lowering and Fluctuations in Sub-0.1 um MOSFET's: A 3-D "Atomistic" Simulation Study
    • Dec
    • A. Asenov, "Random Dopant Induced Threshold Voltage Lowering and Fluctuations in Sub-0.1 um MOSFET's: A 3-D "Atomistic" Simulation Study," IEEE Trans. Electron Device, vol. 45, no. 12, pp. 195-200, Dec. 1998.
    • (1998) IEEE Trans. Electron Device , vol.45 , Issue.12 , pp. 195-200
    • Asenov, A.1
  • 17
    • 0033169519 scopus 로고    scopus 로고
    • Suppression of Random Dopant-Induced Threshold Voltage Fluctuations in Sub-0.1-um MOSFET's with Epitaxial and -Doped Channels
    • Aug
    • A. Asenov and S. Saini, "Suppression of Random Dopant-Induced Threshold Voltage Fluctuations in Sub-0.1-um MOSFET's with Epitaxial and -Doped Channels," IEEE Trans. Electron Device, vol. 46, no. 8, pp. 1718-1724, Aug. 1999.
    • (1999) IEEE Trans. Electron Device , vol.46 , Issue.8 , pp. 1718-1724
    • Asenov, A.1    Saini, S.2
  • 18
    • 0000115765 scopus 로고    scopus 로고
    • A 0.1- m delta doped MOSFET fabricated with post-low-energy implanting selective epitaxy
    • Apr
    • K. Noda, T. Tatsumi, T. Uchida, K. Nakajima, H. Miyamoto, and C. Hu, "A 0.1- m delta doped MOSFET fabricated with post-low-energy implanting selective epitaxy," IEEE Trans. Electron Device, vol. 45, no. 4, pp. 809-813, Apr. 1998.
    • (1998) IEEE Trans. Electron Device , vol.45 , Issue.4 , pp. 809-813
    • Noda, K.1    Tatsumi, T.2    Uchida, T.3    Nakajima, K.4    Miyamoto, H.5    Hu, C.6
  • 19
    • 33947265310 scopus 로고    scopus 로고
    • Simulation Study of Individual and Combined Sources of Intrinsic Parameter Fluctuations in Conventional Nano-MOSFETs
    • Dec
    • G. Roy, A. R. Brown, F. Adamu-Lema, S. Roy, and A. Asenov, "Simulation Study of Individual and Combined Sources of Intrinsic Parameter Fluctuations in Conventional Nano-MOSFETs," IEEE Trans. Electron Device, vol. 53, no. 12, pp. 3063-3070, Dec. 2006.
    • (2006) IEEE Trans. Electron Device , vol.53 , Issue.12 , pp. 3063-3070
    • Roy, G.1    Brown, A.R.2    Adamu-Lema, F.3    Roy, S.4    Asenov, A.5
  • 20
    • 0032595866 scopus 로고    scopus 로고
    • A novel approach for introducing the electron-electron and electron-impurity interactions in particle-based simulations
    • Sept
    • W. J. Gross, D. Vasileska, and D. K. Ferry," A novel approach for introducing the electron-electron and electron-impurity interactions in particle-based simulations," IEEE Electron Device Letter, vol. 20, no. 9, pp. 463-465, Sept. 1999.
    • (1999) IEEE Electron Device Letter , vol.20 , Issue.9 , pp. 463-465
    • Gross, W.J.1    Vasileska, D.2    Ferry, D.K.3
  • 21
    • 0033281305 scopus 로고    scopus 로고
    • Monte Carlo modeling of threshold variation due to dopant fluctuations
    • D. J. Frank, Y. Taur, and H.-S. P. Wong, "Monte Carlo modeling of threshold variation due to dopant fluctuations," in Proc. Symp. VLSI Technology, 1999, pp. 169-170.
    • (1999) Proc. Symp. VLSI Technology , pp. 169-170
    • Frank, D.J.1    Taur, Y.2    Wong, H.-S.P.3
  • 22
    • 42549130489 scopus 로고    scopus 로고
    • Investigation of SNM with Random Dopant Fluctuations for FD SGSOI and FinFET 6T SOI SRAM Cell by Three-dimensional Device Simulation
    • Sept
    • R. Tanabe, Y. Ashizawa, H. Oka, "Investigation of SNM with Random Dopant Fluctuations for FD SGSOI and FinFET 6T SOI SRAM Cell by Three-dimensional Device Simulation," in Simulation of Semiconductor Processes and Device Conf., pp. 103-106, Sept. 2006.
    • (2006) Simulation of Semiconductor Processes and Device Conf , pp. 103-106
    • Tanabe, R.1    Ashizawa, Y.2    Oka, H.3
  • 24
    • 25144443976 scopus 로고    scopus 로고
    • Estimation of delay variations due to random-dopant fluctuations in nanoscale CMOS circuits
    • Sept
    • H. Mahmoodi, S. Mukhopadhyay, and K. Roy," Estimation of delay variations due to random-dopant fluctuations in nanoscale CMOS circuits," IEEE Journal of Solid-State Circuits, vol. 40, no. 9, pp. 1787-1796, Sept. 2005.
    • (2005) IEEE Journal of Solid-State Circuits , vol.40 , Issue.9 , pp. 1787-1796
    • Mahmoodi, H.1    Mukhopadhyay, S.2    Roy, K.3
  • 26
    • 50949086027 scopus 로고    scopus 로고
    • Capacitance fluctuations in bulk MOSFETs due to random discrete dopants
    • Jan, DOI:10.1007/s10825-008-0181-y
    • A. Brown and A. Asenov, "Capacitance fluctuations in bulk MOSFETs due to random discrete dopants," J. Comp. Elect., Jan. 2008. DOI:10.1007/s10825-008-0181-y.
    • (2008) J. Comp. Elect
    • Brown, A.1    Asenov, A.2
  • 27
    • 2942579366 scopus 로고    scopus 로고
    • Multidimensional discretization of the stationary quantum drift-diffusion model for ultrasmall MOSFET structures
    • June
    • S. Odanaka, "Multidimensional discretization of the stationary quantum drift-diffusion model for ultrasmall MOSFET structures," IEEE Trans. Computer-Aided Design Integr. Circuit and Sys., vol. 23, no. 6, pp.837-842, June 2004.
    • (2004) IEEE Trans. Computer-Aided Design Integr. Circuit and Sys , vol.23 , Issue.6 , pp. 837-842
    • Odanaka, S.1
  • 28
    • 54249149841 scopus 로고    scopus 로고
    • Quantum Aspects of Resolving Discrete Charges in 'Atomistic' Device Simulations
    • Dec
    • G. Roy, A. R. Brown, A. Asenov, and S. Roy, "Quantum Aspects of Resolving Discrete Charges in 'Atomistic' Device Simulations, "J. Comp. Elect., vol. 2, no. 2-4, pp. 323-327, Dec. 2003.
    • (2003) J. Comp. Elect , vol.2 , Issue.2-4 , pp. 323-327
    • Roy, G.1    Brown, A.R.2    Asenov, A.3    Roy, S.4
  • 29
    • 11044221347 scopus 로고    scopus 로고
    • A Parallel Adaptive Finite Volume Method for Nanoscale Double-gate MOSFETs Simulation
    • Mar
    • Y. Li and S.-M. Yu, "A Parallel Adaptive Finite Volume Method for Nanoscale Double-gate MOSFETs Simulation," J. Comp. Appl. Math., vol. 175, no.1, pp. 87-99, Mar. 2005.
    • (2005) J. Comp. Appl. Math , vol.175 , Issue.1 , pp. 87-99
    • Li, Y.1    Yu, S.-M.2
  • 30
    • 0036361047 scopus 로고    scopus 로고
    • A Practical Implementation of Parallel Dynamic Load Balancing for Adaptive Computing in VLSI Device Simulation
    • Aug
    • Y. Li, S. M. Sze, and T.S. Chao, "A Practical Implementation of Parallel Dynamic Load Balancing for Adaptive Computing in VLSI Device Simulation," Eng. with Comp., vol. 18, no. 2, pp. 124-137, Aug., 2002.
    • (2002) Eng. with Comp , vol.18 , Issue.2 , pp. 124-137
    • Li, Y.1    Sze, S.M.2    Chao, T.S.3
  • 31
    • 0034516719 scopus 로고    scopus 로고
    • Mixed-mode device simulation
    • Dec
    • T. Grasser, and S. Selberherr, "Mixed-mode device simulation," Microelectronics Journal, vol. 31, no. 11-12, pp.873-881, Dec. 2000.
    • (2000) Microelectronics Journal , vol.31 , Issue.11-12 , pp. 873-881
    • Grasser, T.1    Selberherr, S.2
  • 32
    • 0141952894 scopus 로고    scopus 로고
    • A time-domain approach to simulation and characterization of RF HBT two-tone intermodulation distortion
    • Oct
    • K.-Y. Huang, Y. Li, and C.-P. Lee, "A time-domain approach to simulation and characterization of RF HBT two-tone intermodulation distortion," IEEE Trans. Microwave Theory and Tech., vol.51, no.10, pp.2055-2062, Oct. 2003.
    • (2003) IEEE Trans. Microwave Theory and Tech , vol.51 , Issue.10 , pp. 2055-2062
    • Huang, K.-Y.1    Li, Y.2    Lee, C.-P.3
  • 33
    • 37249059920 scopus 로고    scopus 로고
    • Effect of single grain boundary position on surrounding-gate polysilicon thin film transistors
    • Y. Li, J.-Y. Huang and B.-S. Lee, "Effect of single grain boundary position on surrounding-gate polysilicon thin film transistors," Semiconductor Science and Technology, vol. 23, 015019, 2008.
    • (2008) Semiconductor Science and Technology , vol.23 , pp. 015019
    • Li, Y.1    Huang, J.-Y.2    Lee, B.-S.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.