Choosing the synthesis parameters of hologram-projectors for photolithography

Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

Volumn 75, Issue 9, 2008, Pages 558-562

  Koreshev, S N ^a   Nikanorov, O V ^a   Kozulin, I A ^a  

^a ITMO UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

HOLOGRAPHIC DISPLAYS; IMAGE PROCESSING; IMAGE RECONSTRUCTION; LITHOGRAPHY; PHOTOLITHOGRAPHY;

DISCRETIZATIONS; DISPLAY PARAMETERS; PHOTOLITHOGRAPHIC PROCESS; RECONSTRUCTED IMAGE; SYNTHESIS PARAMETERS;

HOLOGRAMS;

EID: 57749099084     PISSN: 10709762     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOT.75.000558     Document Type: Article

References (12)

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