SCOPUS 정보 검색 플랫폼

Volumn 404, Issue 1, 2009, Pages 58-60

Structure of Ge-O complexes in Czochralski silicon

Author keywords

Czochralski silicon; Ge O complex; Germanium doping

Indexed keywords

DENSITY FUNCTIONAL THEORY; DOPING (ADDITIVES); GERMANIUM; NONMETALS; OXYGEN; PRECIPITATION (CHEMICAL); SEMICONDUCTING SILICON COMPOUNDS;

CZOCHRALSKI SILICON; GE-O COMPLEX; GERMANIUM DOPING; OXYGEN PRECIPITATIONS; STABLE STRUCTURES; TOTAL ENERGIES;

SILICON WAFERS;

EID: 57649210161 PISSN: 09214526 EISSN: None Source Type: Journal
DOI: 10.1016/j.physb.2008.10.035 Document Type: Article

Times cited : (8)

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