Deposition of polymer films by rf discharge at atmospheric pressure

Czechoslovak Journal of Physics

Volumn 54, Issue SUPPL. 3, 2004, Pages

  Slavicek P ^a   Bursikova V ^a   Brablec, A ^a   Kapicka V ^a   Klima M ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Deposition of films; Plasma diagnostics; Rf discharge

Indexed keywords

EID: 57349164679     PISSN: 00114626     EISSN: 15729486     Source Type: Journal    
DOI: 10.1007/BF03166455     Document Type: Article

References (7)

1. V. Bursikova, P. Slavicek, A. Brablec, V. Kapicka, M. Klima: Milos. XV Symposium on Physics of Switching Arc, Vol I. Contributed Papers, Brno, Czech Republic, 2003. p. 22-25,
2. K. Wiesemann: in Book of Invited Lectures. 20th SPIG. (Eds. by N. Konjevic, Z. Lj. Petrovic and G. Malovic), 2000, Zlatibor, Yugoslavia, p. 307.
3. M. Klima, J. Janca, V. Kapicka, P. Slavicek, P. Saul: it The Method of Making a Physically and Chemically Active Environment by Means of a Plasma Jet and the Related Plasma Jet. Czech patent No. 286310 (prior. 12.5.1998) or PCT/CZ99/00012
4. A. Brablec, P. Slavicek, M. Klima, V. Kapicka, J. F. Behnke, M. Sicha: Czech. J. Phys. (2002)561-566.
5. W. C. Oliver and G.M. Pharr, J. Mater: Res. 7. (1992), 1564.
6. W. C. Oliver, G.M. Pharr and F.R. Brotzen, J. Mater: Res. 7 (1992) 613.
7. nd Ed. (1997)