Superhard carbon film deposition by means of laser-arco® on the way from the laboratory into the industrial series coating;Abscheidung Superharter Kohlenstoffschichten Mittels Laser-Arco® auf dem Weg vom Labor in die Industrielle Serienfertigung

Vakuum in Forschung und Praxis

Volumn 20, Issue 6, 2008, Pages 26-31

  Scheibe, Hans Joachim ^a   Leonhardt, Michael ^a   Leson, Andreas ^a   Meyer, Carl Friedrich ^a   Stucky, Thomas ^a   Weihnacht, Volker ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BREAK DOWNS; C FILMS; COATING MACHINES; COUNTER BODIES; CVD PROCESSES; DLC COATINGS; DLC FILMS; DRESDENS; EXTREME CONDITIONS; FILM DEPOSITIONS; FRAUNHOFER; HIGH HARDNESSES; HYDROGEN GAS MIXTURES; LOW FRICTIONS; NEW GENERATIONS; NEW TECHNOLOGIES; PULSED ARC DEPOSITIONS; SUPERHARD; WEAR PROTECTIONS;

AMORPHOUS CARBON; AMORPHOUS FILMS; CAVITY RESONATORS; CHEMICAL VAPOR DEPOSITION; COATINGS; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELECTRIC LOAD MANAGEMENT; GAS MIXTURES; HARD COATINGS; HARDNESS; HYDROGEN; INDUSTRIAL APPLICATIONS; INDUSTRIAL DIAMONDS; LASERS; PROTECTIVE COATINGS; PULSED LASER APPLICATIONS; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE; WEAR RESISTANCE;

CARBON FILMS;

EID: 57349144535     PISSN: 0947076X     EISSN: None     Source Type: Journal    
DOI: 10.1002/vipr.200800370     Document Type: Article

References (13)

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