Synthesis of p-type Al-N codoped ZnO films using N 2 O as a reactive gas by RF magnetron sputtering

Applied Surface Science

Volumn 255, Issue 5 PART 2, 2008, Pages 2958-2962

  Chou, Shih Min ^a   Hon, Min Hsiung ^a   Leu, Ing Chi ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL UNIVERSITY OF TAINAN   (Taiwan)

Author keywords

Codoping; p Type ZnO; RF magnetron sputtering

Indexed keywords

ABSORPTION SPECTROSCOPY; ALUMINA; ALUMINUM OXIDE; HALL MOBILITY; HOLE CONCENTRATION; HOLE MOBILITY; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; SEMICONDUCTING FILMS; THIN FILMS; ZINC OXIDE; ZINC SULFIDE;

CO-DOPING; P TYPE CONDUCTIVITY; P TYPE ZNO; P-N HOMOJUNCTIONS; PREFERRED ORIENTATIONS; RF-MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; WURTZITE STRUCTURE;

FILM PREPARATION;

EID: 56949089730     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.08.083     Document Type: Article

References (17)

1. Chang J.F., and Hon M.H. Thin Solid Films 386 (2001) 79
2. Choi B.H., and Im H.B. Thin Solid Films 193-194 (1990) 712
3. Ohashi N., Kataoka K., Ohgaki T., Sakaguchi I., Haneda H., Kitamura K., and Fujimoto M. Jpn. J. Appl. Phys. 46 (2007) L1042
4. Ahn C.W., Song H.C., and Nahm S. J. Am. Ceram. Soc. 89 (2006) 921
5. Weibenrieder K.S., and Müller J. Thin Solid Films 300 (1997) 30
6. Yamamoto T., and Yoshida H.K. Physica B 302-303 (2001) 155
7. Joseph M., Tabata H., Saeki H., Ueda K., and Kawai T. Physica B 302-303 (2001) 140
8. Aoki T., Hatanaka Y., and Look D.C. Appl. Phys. Lett. 76 (2000) 3257
9. Ryu M.K., Lee S.H., and Jang M.S. J. Appl. Phys. 92 (2002) 158
10. Ye Z.Z., Qian Q., Yuan G.D., Zhao B.H., and Ma D.W. J. Cryst. Growth 274 (2005) 178
11. Zhuge F., Zhu L.P., Ye Z.Z., Lu J.G., Zhao B.H., Huang J.Y., Wang L., Zhang Z.H., and Ji Z.G. Thin Solid Films 476 (2005) 272
12. Cleland T.A., and Hess D.W. J. Electrochem. Soc. 136 (1989) 3103
13. Yan Y.F., and Zhang S.B. Phys. Rev. Lett. 86 (2001) 5723
14. Barnes T.M., Leaf J., Hand S., Fry C., and Wolden C.A. J. Appl. Phys. 96 (2004) 7036
15. Jiao S.J., Zhang Z.Z., Lu Y.M., Shen D.Z., Yao B., Zhang J.Y., Li B.H., Zhao D.X., Fan X.W., and Tang Z.K. Appl. Phys. Lett. 88 (2006) 031911
16. Zhang Y.H. J. Mater. Sci. Lett. 21 (2002) 1603
17. Bian J.M., Li X.M., Zhang C.Y., Yu W.D., and Gao X.D. Appl. Phys. Lett. 85 (2004) 4070