Proposal on nonlinear friction compensation based on variable natural length spring model

Proceedings of the SICE Annual Conference

Volumn , Issue , 2008, Pages 2393-2398

  Asaumi, Hiroyoshi ^a   Fujimoto, Hiroshi ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

Ball screw driven stage; Nonlinear friction compensation; Rolling friction model

Indexed keywords

FRICTION; INFORMATION TECHNOLOGY; INSTRUMENTS; LATHES; MACHINE TOOLS; MACHINERY; PLATINUM COMPOUNDS; POSITION CONTROL; SPRINGS (COMPONENTS); STICTION; TRIBOLOGY;

BALL-SCREW-DRIVEN STAGE; EXPOSURE SYSTEMS; FRICTION MODELS; INDUSTRIAL EQUIPMENTS; MICROFABRICATION TECHNOLOGIES; MODELING ERRORS; NATURAL LENGTHS; NONLINEAR FRICTION COMPENSATION; NONLINEAR FRICTION COMPENSATIONS; PERFECT TRACKING CONTROLS; POSITIONING PERFORMANCES; PRECISE POSITIONING; RESEARCH GROUPS; ROLLING FRICTION MODEL; ROLLING FRICTIONS; SPRING MODELS;

CONTROL SYSTEMS;

EID: 56749098295     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SICE.2008.4655065     Document Type: Conference Paper

References (6)

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2. T. Koizumi, O. Kuroda: "Analysis of Damped Vibration of a Vibration of a System with Rolling Friction -Rolling Friction Depends on the Displacement," Journal of Japanese Society of Tribologists, 35-6, pp.435-439 (1990) (in Japanese)
3. S. Futami, A. Furutani: "Nanometer Positioning Using AC Linear Motor and Rolling Guide (2nd Report) -Tribology of the Rolling Guide-," JSPE, 57-10, pp. 1808-1813 (1991) (in Japanese)
4. K. Ito, Y. Maeda, Y. Higuchi, M. Kawafuku, M. Iwasaki, H. Hirai: "Nonlinear Modeling and Evaluation of Rolling Friction," Papers pf Technical Meeting on IIC, IEE Japan, IIC-06-14, pp.77-82 (2006) (in Japanese)
5. Y. Maeda, Y. Higuchi, M. Kawafuku, M. Iwasaki, H. Hirai: "Rolling Friction Model-Based Initial Value Compensation of Disturbance Observer," Papers pf Technical Meeting on IIC, IEE Japan, IIC-06-88, pp.145-151 (2006) (in Japanese)
6. S. Futami, A. Furutani: "Nanometer Positioning Using AC Linear Motor and Rolling Guide (1st Report) -System. Set-up and Coarse/Fine Positioning-," JSPE, 57-3, pp.556-561 (1991) (in Japanese)