Local charge neutralization using secondary electrons induced by focused electron beam in TOF-SIMS analysis

Applied Surface Science

Volumn 255, Issue 4, 2008, Pages 1621-1624

  Sakamoto, Tetsuo ^a   Yamaguchi, Jyun ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

Charge neutralization; FIB; Particle; Secondary electron; TOF SIMS

Indexed keywords

ELECTRON BEAMS; IRRADIATION; PARTICLES (PARTICULATE MATTER); SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY;

CHARGE NEUTRALIZATION; DIRECT IRRADIATION; EXTRACTION VOLTAGE; FOCUSED ELECTRON BEAMS; INSULATING PARTICLES; SECONDARY ELECTRONS; TOF SIMS; TOF-SIMS ANALYSIS;

ELECTRONS;

EID: 56449117979     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.152     Document Type: Article

References (2)

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2. Gilmore I.S., and Seah M.P. Appl. Surf. Sci. 203-204 (2003) 600