Multiscale control for nanoprecision positioning systems with large throughput

IEEE Transactions on Control Systems Technology

Volumn 15, Issue 5 SPEC. ISS., 2007, Pages 945-951

  Shakir, Huzefa ^a,b   Kim, Wong Jong ^a  

^a Texas AandM University   (United States)

^b Energy Services Inc   (United States)

Author keywords

Multiscale control; Nanopositioning; Optimal proportional integral (PI) control; Reduced order model following; Semiconductor manufacturing

Indexed keywords

MULTISCALE CONTROL; NANOPOSITIONING; OPTIMAL PROPORTIONAL-INTEGRAL (PI) CONTROL; REDUCED-ORDER MODEL FOLLOWING; SEMICONDUCTOR MANUFACTURING;

ELECTRIC CONDUCTIVITY; EQUIPMENT TESTING; MAGNETIC LEVITATION; METHOD OF MOMENTS; OPTIMIZATION; ROBUST CONTROL; SEMICONDUCTOR MATERIALS; TWO TERM CONTROL SYSTEMS;

TIME DOMAIN ANALYSIS;

EID: 56449090579     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2007.902957     Document Type: Article

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