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Shinku/Journal of the Vacuum Society of Japan

Volumn 39, Issue 1, 1996, Pages 11-14

The effect of surface roughness on the adhesion of copper thin film to polyimide substrate

(5) Miyashita, Takehiro a Iwamori, Satoru a Fukuda, Shin a Fukuda, Nobuhiro a Sudoh, Kazufuyu a

a MITSUI CHEMICALS INC (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5644293349 PISSN: 05598516 EISSN: None Source Type: Journal
DOI: 10.3131/jvsj.39.11 Document Type: Article

Times cited : (3)

References (8)

1
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- Japanese source

2
- 85033864834
- Japanese source

3
- 21344484418
- A. C. Callegari, H. M. Clearfield, B. K. Furman, T. G. Graham, D. Neugroschl and S. Purushotham: J. Vac. Sci. Technol., A12 (1994) 185.
- (1994) J. Vac. Sci. Technol. , vol.A12 , pp. 185
- Callegari, A.C.¹ Clearfield, H.M.² Furman, B.K.³ Graham, T.G.⁴ Neugroschl, D.⁵ Purushotham, S.⁶

4
- 0025387361
- S. K. Koh and K. D. Pae: Polymer Eng. Sci., 30 (1990) 137.
- (1990) Polymer Eng. Sci. , vol.30 , pp. 137
- Koh, S.K.¹ Pae, K.D.²

5
- 85033855575
- Japanese source

6
- 85033842704
- Japanese source

7
- 29244471167
- R. Flitsch and D. Y. Shih: J. Vac. Sci. Technol., A8 (1990) 2376.
- (1990) J. Vac. Sci. Technol. , vol.A8 , pp. 2376
- Flitsch, R.¹ Shih, D.Y.²

8
- 0001634596
- D. L. Pappas and J. J. Cuomo: J. Vac. Sci. Technol., A9 (1991) 2704.
- (1991) J. Vac. Sci. Technol. , vol.A9 , pp. 2704
- Pappas, D.L.¹ Cuomo, J.J.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.