Strategies for low cost imprint molds

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7039, Issue , 2008, Pages

  Watts, M P C ^a  

^a Impattern Solutions   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MOLDS;

ANALOG PATTERNS; COST OF OWNERSHIPS; IMPRINT TECHNOLOGIES; LOW COSTS; PATTERN GENERATORS; STEP AND REPEATS;

COSTS;

EID: 56349134081     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.798222     Document Type: Conference Paper

References (22)

1. Suppliers such as DNP, Photronics, Toppan
2. NILT based in Denmark, (www.nilt.de)
3. Wavefront Technology, based in California www.wavefront.com
4. P. Deshpande et.al. , "Large area orientation of microphase separation in 21 nm period diblock copolymer gratings", NNT 2003
5. Z. Yu et.al. "Fabrication of 30 nm pitch nanowire array imprint molds by frequency doubling for ultra high density molecular electronics", NNT 2005
6. Moore Machine tool (www.moore.com)
7. M. Kawamori et.al. "Nanoimprint lithography using hydrogen silsequioxane (HSQ) mold", NNT 2005
8. Miller et. al. "Step and flash imprint processes and technology of photonic crystal patterning : Template Replication through wafer processing. NNT 2007 9www.RPCphotonics.com
9. K. Mohamed et. al. "The fabrication of 3D molds for UV curable nanoimprint by using the variable dose controlled exposure of electron beam" NNT 2006.
10. G. Willson et.al. "Imprint Lithography for Dual Damascene" NNT 2006
11. J. Ahopelto, "Progress of NaPa", NNT 2005
12. Silicon Valley Technology Center - www.svtc.com
13. G.Lecarpentier et.al. "Step and Stamp Lithography for stitching patterns in large stamp manufacturing" NNT 2007
14. Nanonex, EVG, Suss for example
15. MII (www.militho.com)
16. M. Watts et.al. "S-FIL based large area imprint solutions for non flat substrates" NNT 2005
17. S.V. Shreenivasan et.al, SPIE Microlithography , March 2008
18. Technotrans (www.technotrans.com) and other captive roll to, roll suppliers
19. Heptagon (www.heptagon.fi)
20. I.Bergmair et al, "Replication of stamps for UV-NIL using Ormocers", NNT 2007
21. Obducat (www.obducat.com)
22. Transfer Devices (www.transferdevices.com)