Assessment of electron energy distributions in discharges by optical emission spectroscopy

AIP Conference Proceedings

Volumn 954, Issue , 2007, Pages 468-475

  Dodt, Dirk ^a   Dinklage, Andreas ^a   Fischer, Rainer ^b   Preuss, Roland ^b  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b NONE   (Germany)

Author keywords

EEDF; Electron energy distribution function; Neon plasma; Optical emission spectroscopy

Indexed keywords

EID: 56349117598     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2821299     Document Type: Conference Paper

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