Metrology with μcT: Precision challenge

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7078, Issue , 2008, Pages

  Suppes, Alexander ^a   Neuser, Eberhard ^a  

^a Phoenix/x ray Systems + Services GmbH   (Germany)

Author keywords

Beam hardening correction; Computed tomography; Length measurement error; Metrology; Probing error; Surface extraction

Indexed keywords

ASSEMBLY MACHINES; COMPUTERIZED TOMOGRAPHY; COORDINATE MEASURING MACHINES; DIAGNOSTIC RADIOGRAPHY; EARTH SCIENCES; ELECTRIC INSTRUMENT TRANSFORMERS; ELECTRON TUBES; ERROR CORRECTION; HARDENING; IMAGING SYSTEMS; INDUSTRIAL APPLICATIONS; MEASUREMENTS; MEDICAL IMAGING; MICROELECTRONICS; POTENTIAL FLOW; RADIOGRAPHY; SURFACES; THICKNESS MEASUREMENT; TOMOGRAPHY; VEGETATION;

BEAM HARDENING CORRECTION; COMPUTED TOMOGRAPHY; LENGTH MEASUREMENT ERROR; METROLOGY; PROBING ERROR; SURFACE EXTRACTION;

X RAY TUBES;

EID: 56249124587     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.793776     Document Type: Conference Paper

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