Range-gated metrology: An ultra-compact sensor for dimensional stabilization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7018, Issue , 2008, Pages

  Lay, Oliver P ^a   Dubovitsky, Serge ^a   Shaddock, Daniel A ^a   Ware, Brent ^a   Woodruff, Christopher S ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Laser metrology

Indexed keywords

COST EFFECTIVENESS; FIBERS; GAGES; INSTRUMENTS; LASERS; MEASUREMENTS; OPTICAL FIBERS; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; OPTICAL SENSORS; OPTICAL SYSTEMS; OPTICAL TELESCOPES; PHOTOGRAPHY; POWDERS; SENSORS; SIGNAL PROCESSING; SPACECRAFT OBSERVATORIES; TELESCOPES; THICKNESS MEASUREMENT;

LABORATORY ENVIRONMENTS; LARGE STRUCTURES; LASER METROLOGIES; LASER METROLOGY; LASER METROLOGY SYSTEMS; NANOMETER LEVELS; OPTICAL ELEMENTS; OPTICAL FIBER CONNECTIONS; OPTICAL HEADS; SENSOR SYSTEMS; SIGNAL PROCESSING TECHNIQUES; SINGLE FIBERS; SINGLE OPTICAL FIBERS;

OPTICAL COLLIMATORS;

EID: 56249118403     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.789437     Document Type: Conference Paper

References (3)

1. D. A. Shaddock, "Digitally enhanced heterodyne interferometry," Opt. Lett., Vol. 32, pp. 3355-3357 (2007)
2. O. P. Lay, S. Dubovitsky, D. A. Shaddock, and B. Ware, "Coherent range-gated laser displacement metrology with compact optical head", Opt. Lett., Vol. 32, pp. 2933-2935 (2007)
3. O. P. Lay, S. Dubovitsky, R. D. Peters, J. P. Burger, S.-W. Ahn, W. H. Steier, H. R. Fetterman, and Y. Chang, "MSTAR: a submicrometer absolute metrology system," Opt. Lett., Vol. 28, pp. 890-892 (2003)