Metal mirrors with excellent figure and roughness

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7102, Issue , 2008, Pages

  Steinkopf, R ^a   Gebhardt, A ^a   Scheiding, S ^a   Rohde, M ^a   Stenzel, O ^a   Gliech, S ^a   Giggel, V ^b   Loscher H ^b   Ullrich, G ^b   Rucks, P ^b   Duparre, A ^a   Risse, S ^a   Eberhardt, R ^a   Tunnermann A ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b CARL ZEISS SMT AG   (Germany)

Author keywords

Aspherical mirror; Ion beam figuring; Metal mirror; Polishing; Single point diamond turning; Surface characterisation

Indexed keywords

APPLICATIONS; BEAM PLASMA INTERACTIONS; DIAMONDS; INFRARED DEVICES; INTERFEROMETERS; INTERFEROMETRY; ION BEAMS; ION BOMBARDMENT; MIRRORS; PHOSPHORUS; POLISHING; PROFILOMETRY; THREE DIMENSIONAL; TURNING; TWO DIMENSIONAL;

ASPHERICAL MIRROR; ASPHERICAL SURFACES; CHARACTERISATION; ECONOMICAL PRODUCTIONS; FINISHING PROCESSES; FORM ACCURACIES; HIGH QUALITIES; ION BEAM FIGURING; MANUFACTURING CHAINS; MEASUREMENT RESULTS; METAL MIRROR; METAL MIRRORS; NEAR INFRARED; OPTICAL APPLICATIONS; OPTICAL SHAPES; OPTICAL SURFACES; QUALITY LEVELS; ROOT MEAN SQUARES; SCATTER LOSSES; SCATTERING LIGHTS; SHAPE IRREGULARITIES; SINGLE POINT DIAMOND TURNING; SINGLE POINT DIAMOND TURNINGS; SURFACE FINISHES; SURFACE IRREGULARITIES; WHITE LIGHT INTERFEROMETRIES;

SURFACE PROPERTIES;

EID: 56249115933     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.797702     Document Type: Conference Paper

References (11)

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