Mirror-embedded microchannel for three-dimensional measurement of particle position

Applied Physics Letters

Volumn 93, Issue 19, 2008, Pages

  Choi, Sungyoung ^a   Park, Je Kyun ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

MICROCHANNELS; MIRRORS; OPTICAL INSTRUMENTS; SILICON;

3D POSITIONS; DIMENSIONAL MEASUREMENTS; EMBEDDED MICROCHANNELS; MEASUREMENT PRINCIPLES; OPTICAL EQUIPMENTS; OPTICAL MODIFICATIONS; POSITIONAL INFORMATIONS; SIDE VIEWS; SILICON MIRRORS; VERTICAL DIRECTIONS;

THREE DIMENSIONAL;

EID: 56249115883     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3027058     Document Type: Article

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