Examining water vapor content for purging critical space systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7069, Issue , 2008, Pages

  Chang, Chien W ^a   Bush, Jeffrey D ^a   Peabody, Robert R ^a  

^a LOCKHEED MARTIN SPACE SYSTEMS COMPANY   (United States)

Author keywords

Contamination control; Gaseous purging; Water vapor control

Indexed keywords

CONTAMINATION; OPTICAL SYSTEMS; PHOTOLITHOGRAPHY; VAPORS; WATER ANALYSIS; WATER CONTENT; WATER POLLUTION;

CONTAMINATION CONTROL; CRITICAL SPACE SYSTEMS; GASEOUS PURGING; HUMIDITY REQUIREMENTS; MEASURED DATUMS; TEST ENGINEERINGS; VAPOR CONDENSATIONS; VEHICLE INTEGRATIONS; WATER VAPOR CONTROL;

WATER VAPOR;

EID: 56249098346     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.793884     Document Type: Conference Paper

References (3)

1. Weston, G. F., [Ultrahigh Vacuum Practice], Butterworths, 6 (1985).
2. See "dew point" in Wikipedia, http://en.wikipedia.org/wiki/ Dew_point point.
3. Perry, R. H. and Chilton, C. H., [Chemical Engineers's Handbook], McGraw-Hill Book Co., 5th Ed., 12-4 (1973).