Stable flexure mounting of a MEMS deformable mirror for the GPI Planet Imager

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7018, Issue , 2008, Pages

  Hill, Alexis ^a   Erickson, Darren ^a   Fitzsimmons, Joeleff ^a   Bierden, Paul ^b   Cornelissen, Steven ^b   Palmer, Dave ^c  

^a NATIONAL RESEARCH COUNCIL   (United States)

^b BOSTON MICROMACHINES CORPORATION   (United States)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

Adaptive optics; Deformable mirror; Flexures; MEMS; Opto mechanical mount

Indexed keywords

ADAPTIVE OPTICS SYSTEMS; AMBIENT TEMPERATURES; DEFORMABLE MIRROR; DEFORMABLE MIRRORS; ENVIRONMENTAL REQUIREMENTS; FIELD APPLICATIONS; FLEXURES; GRAVITY VECTORS; HUMIDITY EFFECTS; LABORATORY ENVIRONMENTS; MECHANICAL DESIGNS; MEMS DEFORMABLE MIRRORS; MICRO-ELECTRO-MECHANICAL SYSTEMS; MICROMACHINES; OPTICAL MOUNTINGS; OPTICAL SURFACES; OPTO-MECHANICAL MOUNT; THERMAL FLUCTUATIONS;

ADAPTIVE OPTICS; DEFORMATION; ELECTROMECHANICAL DEVICES; EXTRACTIVE METALLURGY; GRAVITATION; GRAVITATIONAL EFFECTS; IMAGE SENSORS; INSTRUMENTS; LASER PULSES; MEMS; METEOROLOGY; MICROELECTROMECHANICAL DEVICES; MIRRORS; MOISTURE; MOUNTINGS; OPTICAL INSTRUMENTS; OPTICAL TELESCOPES; PHOTOGRAPHY; TELESCOPES;

COMPOSITE MICROMECHANICS;

EID: 56249094541     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.789408     Document Type: Conference Paper

References (1)

1. Fitzsimmons, J. T., "Design and analysis of flexure mounts for precision optics," Proc. SPIE This conference, 7018-167 (2008).