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Volumn , Issue , 2007, Pages 417-419
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Fabrication of light guide plate using backside exposure lithography
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Author keywords
Backside exposure; Light guide plate; Lithography; Microstructure; Taper angle
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Indexed keywords
ABS RESINS;
EXHIBITIONS;
LIGHT;
MICROLENSES;
MICROSTRUCTURE;
PHOTORESISTS;
PLATES (STRUCTURAL COMPONENTS);
BACKSIDE EXPOSURE;
BACKSIDE EXPOSURES;
EXPOSURE DOSES;
LIGHT GUIDE PLATE;
LIGHT GUIDE PLATES;
LIGHT LUMINESCENCES;
MEASUREMENT RESULTS;
MICROLENS ARRAYS;
POLYMER DISKS;
SIMULATION RESULTS;
TAPER ANGLE;
TAPER ANGLES;
LITHOGRAPHY;
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EID: 56049112822
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (5)
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