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Volumn 1213, Issue 1, 2008, Pages 70-76
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Ion-chromatographic determination of seven common anions in electronic-grade, water-miscible solvents
a
AIR LIQUIDE
(France)
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Author keywords
Acetone; Ion chromatography; Isopropyl alcohol; Methanol; N Methyl 2 pyrrolidone; Statistical analysis; Trace anions
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Indexed keywords
ACETONE;
CALIBRATION;
CHROMATOGRAPHIC ANALYSIS;
DEIONIZED WATER;
ION CHROMATOGRAPHY;
IONIC LIQUIDS;
METHANOL;
NEGATIVE IONS;
NITRATES;
ORGANIC SOLVENTS;
RECOVERY;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICE MODELS;
SEMICONDUCTOR DEVICES;
SOLVENTS;
TRACE ANALYSIS;
CALIBRATION CURVES;
CHROMATOGRAPHIC DETERMINATIONS;
CHROMATOGRAPHIC METHODS;
CONDUCTIVITY DETECTORS;
ISOPROPYL ALCOHOL;
ISOPROPYL ALCOHOLS;
MISCIBLE SOLVENTS;
N-METHYL-2-PYRROLIDONE;
PYRROLIDONE;
RECOVERY CURVES;
SPIKING STUDIES;
STATISTICAL ANALYSIS;
TRACE ANIONS;
IONS;
1 METHYL 2 PYRROLIDINONE;
2 PROPANOL;
ACETONE;
BROMIDE ION;
CHLORIDE ION;
FLUORIDE ION;
METHANOL;
NITRATE;
NITRITE;
PHOSPHATE;
SULFATE;
ARTICLE;
CALIBRATION;
CHEMICAL ANALYSIS;
CHROMATOGRAPHY;
CONCENTRATION (PARAMETERS);
ION EXCHANGE;
ION PAIR CHROMATOGRAPHY;
PRIORITY JOURNAL;
SEMICONDUCTOR;
ACETONE;
ANIONS;
BENZENE DERIVATIVES;
CHROMATOGRAPHY, ION EXCHANGE;
METHANOL;
PYRROLIDINONES;
SENSITIVITY AND SPECIFICITY;
SOLVENTS;
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EID: 55949099798
PISSN: 00219673
EISSN: None
Source Type: Journal
DOI: 10.1016/j.chroma.2008.09.047 Document Type: Article |
Times cited : (26)
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References (15)
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