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Volumn 1213, Issue 1, 2008, Pages 70-76

Ion-chromatographic determination of seven common anions in electronic-grade, water-miscible solvents

Author keywords

Acetone; Ion chromatography; Isopropyl alcohol; Methanol; N Methyl 2 pyrrolidone; Statistical analysis; Trace anions

Indexed keywords

ACETONE; CALIBRATION; CHROMATOGRAPHIC ANALYSIS; DEIONIZED WATER; ION CHROMATOGRAPHY; IONIC LIQUIDS; METHANOL; NEGATIVE IONS; NITRATES; ORGANIC SOLVENTS; RECOVERY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICES; SOLVENTS; TRACE ANALYSIS;

EID: 55949099798     PISSN: 00219673     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.chroma.2008.09.047     Document Type: Article
Times cited : (26)

References (15)
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    • Book of SEMI Standards, 2008 Process Chemicals Volume, Semiconductor Equipment and Materials International, Mountain View, CA, USA, 2008.
    • Book of SEMI Standards, 2008 Process Chemicals Volume, Semiconductor Equipment and Materials International, Mountain View, CA, USA, 2008.
  • 2
    • 55949111798 scopus 로고    scopus 로고
    • Book of SEMI Standards, 1989 Process Chemicals Volume, Semiconductor Equipment and Materials International, Mountain View, CA, USA, 1989.
    • Book of SEMI Standards, 1989 Process Chemicals Volume, Semiconductor Equipment and Materials International, Mountain View, CA, USA, 1989.
  • 6
    • 55949123097 scopus 로고    scopus 로고
    • Application Update 163, Dionex, Sunnyvale, CA, USA, 2007.
    • Application Update 163, Dionex, Sunnyvale, CA, USA, 2007.
  • 9
    • 55949130439 scopus 로고    scopus 로고
    • Product Manual - Continuously Regenerated Trap Column, Doc. 031910, Rev. 01, Dionex, Sunnyvale, CA, 2003.
    • Product Manual - Continuously Regenerated Trap Column, Doc. 031910, Rev. 01, Dionex, Sunnyvale, CA, 2003.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.