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Volumn , Issue , 2005, Pages 157-166
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Epitaxy
a a |
Author keywords
[No Author keywords available]
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Indexed keywords
FILM GROWTH;
LATTICE MISMATCH;
MICROELECTRONICS;
QUALITY CONTROL;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR QUANTUM WELLS;
SILICON WAFERS;
SUBSTRATES;
THIN FILMS;
BULK GROWTH;
CONDITION;
CRYSTALLINE FILMS;
FREE SURFACES;
GROWTH TECHNIQUES;
MONOLITHIC INTEGRATION;
PRECISE METHOD;
SENSITIVE METHOD;
SPATIALLY RESOLVED;
THIN-FILMS;
EPITAXIAL GROWTH;
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EID: 55549140342
PISSN: None
EISSN: None
Source Type: Book
DOI: 10.1016/B0-12-369401-9/00692-6 Document Type: Chapter |
Times cited : (5)
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References (11)
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