Microfabricated structures for the in situ measurement of residual stress, Young's modulus, and ultimate strain of thin films

Applied Physics Letters

Volumn 51, Issue 4, 1987, Pages 241-243

  Allen, Mark G ^a   Mehregany, Mehran ^a   Howe, Roger T ^a   Senturia, Stephen D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544274244     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.98460     Document Type: Article

References (17)