Gas sensing characteristics of zinc-tin complex oxide thin films with spinel-type structure

Journal of the Ceramic Society of Japan

Volumn 104, Issue 11, 1996, Pages 1048-1051

  Hiratsuka, Nobuyuki ^a   Kobayashi, Hiroshi ^a   Uchida, Hidekazu ^a   Katsube, Teruaki ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

Evaporation method; Gas selectivity; Gas sensor; Thin film; Zn2SnO4

Indexed keywords

ALUMINA; ANNEALING; CHEMICAL SENSORS; CRYSTALLINE MATERIALS; EVAPORATION; HIGH TEMPERATURE EFFECTS; LAMINATING; SUBSTRATES; THIN FILM DEVICES; TIN COMPOUNDS; ZINC OXIDE;

GAS SENSITIVITY;

METALLIC FILMS;

EID: 5544272666     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.104.1048     Document Type: Article

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