Scanning force microscopy with two optical levers for detection of deformations of the cantilever

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 872-876

  Kawakatsu, Hideki ^a,b   Saito, Takashi ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITY OF BASEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544247767     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589165     Document Type: Article

References (10)

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