Experimental test of models of radio-frequency plasma sheaths

Applied Physics Letters

Volumn 70, Issue 8, 1997, Pages 1049-1051

  Sobolewski, M A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544236553     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118464     Document Type: Article

References (13)

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