Deconvolution of topographic and ferroelectric contrast by noncontact and friction force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1191-1196

  Eng, L M ^a   Friedrich, M ^a   Fousek, J ^a,b   Gunter P ^a  

^a ETH ZURICH   (Switzerland)

^b INSTITUTE OF MATHEMATICS   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544232236     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588512     Document Type: Article

References (26)

1. R. Bruchhaus, H. Huber, D, Pitzer, and W. Wersing, Ferroelectrics 127, 137 (1992).
2. M. R. Srinivasan and H. J. Bhat, Condensed Mater. News 2, 12 (1993).
3. A. Sawada and R. Abe, Jpn. J. Appl. Phys. 6, 699 (1967).
4. N. Nakatani, Jpn. J. Appl. Phys. 24, L528 (1985).
5. K. Distler and L. A. Shenyavskaya, Krist. Technol. 11, 4 (1976).
6. J. Fousek, M. Safarankova, and J. Kaczer, Appl. Phys. Lett. 15, 192 (1966).
7. R. Le Bihan and M. Maussion, J. Phys. (Paris) 33, C2-215 (1974).
8. N. Nakatani, Ferroelectr. 97, 127 (1989).
9. K. Takahashi and M. Takagi, J. Phys. Soc. Jpn. 44, 1266 (1978).
10. A. Hadni and R. Thomas, Phys. Status Solidi A 31, 71 (1975).
11. G. Binnig, C. Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1986).
12. F. Saurenbach and B. D. Terris, Appl. Phys. Lett. 56, 1703 (1990).
13. R. Lüthi, H. Haefke, K.-P. Meyer, E. Meyer, L. Howald, and H.-J. Güntherodt, J. Appl. Phys. 74, 7461 (1993).
14. H. Haefke, R. Lüthi, K.-P. Meyer, and H.-J. Güntherodt, Ferroelectrics 151, 143 (1994).
15. R. Lüthi, H. Haefke, W. Gutmannsbauer, E. Meyer, L. Howald, and H.-J. Güntherodt, J. Vac. Sci. Technol. B 12, 2451 (1994).
16. K. Franke and M. Weihnacht, Ferroelectr. Lett. 19, 25 (1995).
17. N. Nakatani, Jpn. J. Appl. Phys. 12, 1723 (1973).
18. A. G. Chynoweth and J. L. Abel, J. Appl. Phys. 30, 1073 (1959).
19. J. Fousek, Jpn. J. Appl. Phys. 6, 950 (1967); J. Hatano, F. Suda, and H. Futama, Ferroelectr. 20, 265 (1978).
20. J. Fousek, Jpn. J. Appl. Phys. 6, 950 (1967); J. Hatano, F. Suda, and H. Futama, Ferroelectr. 20, 265 (1978).
21. L. M. Eng, M. Friedrich, J. Fousek, and P. Günter, Ferroelectrics (to be published).
22. J. F. Petroff, Phys. Status Solidi 31, 285 (1969); D. Y. Parpia, Philos. Mag. A 46, 691 (1982).
23. J. F. Petroff, Phys. Status Solidi 31, 285 (1969); D. Y. Parpia, Philos. Mag. A 46, 691 (1982).
24. B. Hilczer, L. Szczesniak, and K.-P. Meyer, Ferroelectrics 97, 59 (1989).
25. A. G. Chynoweth and W. L. Feldmann, J. Phys. Chem. Solids 15, 225 (1960).
26. x) may be charged, giving rise to a net contrast between individual domains rather than the domain boundary.