In situ ultrahigh vacuum residual gas analyzer "calibration"

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 6, 2008, Pages 1474-1479

  Malyshev, O B ^a   Middleman, K J ^a  

^a DARESBURY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ELECTRON MULTIPLIERS; GAGES; GAS FUEL ANALYSIS; GASES; ION BEAMS; PIEZOELECTRIC ACTUATORS; SPECTRUM ANALYZERS; THICKNESS MEASUREMENT; ULTRAHIGH VACUUM; VACUUM; VACUUM APPLICATIONS;

ACCURATE DEVICES; CALIBRATION COEFFICIENTS; FARADAY CUPS; IN-SITU; IONIZATION GAUGES; QUADRUPOLE MASS ANALYZERS; QUANTITATIVE GAS ANALYSIS; RESIDUAL GAS ANALYZERS; RESIDUAL GASSES; SECONDARY ELECTRON MULTIPLIERS; TOTAL PRESSURES;

IONIZATION OF GASES;

EID: 55349135886     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2990856     Document Type: Article

References (6)

1. J. A. Basford, M. D. Boeckmann, R. E. Ellefson, A. R. Fillippelli, D. H. Holkeboer, L. Lieszkovszky, and C. M. Stupak, J. Vac. Sci. Technol. A 11, A22 (1993). 0734-2101
2. J. H. Leck, Total and Partial Pressure Measurement in Vacuum Systems (Blackie, Glasgow, London, 1989), p. 73.
3. J. M. Lafferty, Foundations of Vacuum Science and Technology (Wiley, New York, 1998).
4. Proceedings of CERN Accelerator School and ALBA Synchrotron Light Facility: Vacuum in Accelerators, Platja d'Aro, Spain, 16-24 May 2006, p. 145., p. 145.
5. W. R. Blanchard, P. J. McCarthy, H. F. Dylla, P. H. LaMarche, and J. E. Simpkins, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.573963 4, 1715 (1986).
6. N. R. Reagan, L. C. Frees, and J. W. Gray, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.574460 5, 2389 (1987).