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Volumn 33, Issue 19, 2008, Pages 2275-2277
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Materials with on-demand refractive indices in the terahertz range
b
UNIV LILLE
(France)
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Author keywords
[No Author keywords available]
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Indexed keywords
BIREFRINGENCE;
PLASMA ETCHING;
REFRACTIVE INDEX;
SILICON WAFERS;
BUILDING BLOCKES;
DEFECT MODE;
DIELECTRIC SUBSTRATES;
FILLING FACTOR;
INDUCTIVE PLASMA;
ON DEMANDS;
TERAHERTZ RANGE;
THICK LAYERS;
DIELECTRIC MATERIALS;
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EID: 55349112161
PISSN: 01469592
EISSN: None
Source Type: Journal
DOI: 10.1364/OL.33.002275 Document Type: Article |
Times cited : (26)
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References (14)
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