Interdigitated array electrodes with nano gaps using optical lithography and controlled undercut method

2008 8th IEEE Conference on Nanotechnology, IEEE-NANO

Volumn , Issue , 2008, Pages 851-854

  Shim, Joon S ^a   Rust, Michael J ^a   Ahn, Chong H ^a  

^a University of Cincinnati   (United States)

Author keywords

Contolled undercut method; Interdigitated array; Lab on a chip; Nano biosensor; Nano gap; Nanofabrication

Indexed keywords

CONTOLLED UNDERCUT METHOD; INTERDIGITATED ARRAY; LAB ON A CHIP; NANO BIOSENSOR; NANO GAP; NANOFABRICATION;

BIOSENSORS; ELECTRODES; GALLIUM ALLOYS; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; SIGNAL TRANSDUCTION;

ELECTROCHEMICAL ELECTRODES;

EID: 55349096129     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2008.254     Document Type: Conference Paper

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