Scanning interferometry: Measuring microscale devices

Nature Photonics

Volumn 2, Issue 11, 2008, Pages 661-663

  Conroy, Mike ^a   Mansfield, Daniel ^a  

^a Taylor and Hobson Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCALE DEVICES;

PHOTONICS;

EID: 55249096469     PISSN: 17494885     EISSN: 17494893     Source Type: Journal    
DOI: 10.1038/nphoton.2008.216     Document Type: Short Survey

References (0)