Sequential lateral solidification (SLS) process for large area AMOLED

Digest of Technical Papers - SID International Symposium

Volumn 39, Issue 1, 2008, Pages 97-100

  Choi, Jae Seom ^a   Chang, Young Jin ^a   Park, Cheol Ho ^a   Kim, Young Il ^a   Eom, JiHye ^a   Na, Hyung Don ^a   Chung, In Do ^a   Jin, Seong Hyun ^a   Song, Young Rok ^a   Choi, Beomrak ^a   Kim, Hyo Seok ^a   Park, Kyongtae ^a   Kim, Chi Woo ^a   Souk, JunHyung ^a   Kim, Yangsun ^a   Jung, Baehyun ^a   Park, Keechan ^b  

^a SAMSUNG Electronics   (South Korea)

^b Konkuk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

SOLIDIFICATION; THIN FILMS;

APERTURE RATIO; CONTROLLED GRAIN SIZE; EVAPORATION PROCESS; FINE METAL MASKS; POLYCRYSTALLINE; PROCESS WINDOW; SEQUENTIAL LATERAL SOLIDIFICATIONS; THIN-FILM TRANSISTOR (TFTS);

THIN FILM TRANSISTORS;

EID: 55149117219     PISSN: 0097966X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1889/1.3069845     Document Type: Conference Paper

References (3)

1. T. Sameshima and S. Usui, Mater. Res. Soc. Symp. Proc. 71, 435 (1986)
2. 2" Appl. Phys. Lett. 69, 2864 (1996)
3. C. W. Kim, K. C. Moon, H. J. Kim, C. H. Park, I. G. Kim, C. M. Kim, S. Y. Yoo, U. J. Chung, "Development of SLS-Based System on Glass Display" Proc. SID Symposium Digest, Vol. 35, pp. 868-871, 2004