Optical and structural properties of Ge films from ion-assisted deposition

Thin Solid Films

Volumn 517, Issue 2, 2008, Pages 704-708

  Ku, Shih Liang ^a   Lee, Cheng Chung ^a   Tsai, Jin Sheng ^b  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b INSTITUTE OF PHYSICS   (Taiwan)

Author keywords

Germanium; Ion assisted deposition; Optical properties; Structural properties

Indexed keywords

CORUNDUM; CRYSTALLINE MATERIALS; CRYSTALLITES; GERMANIUM; ION BEAM ASSISTED DEPOSITION; IONS; MICROSCOPIC EXAMINATION; MOLECULAR BEAM EPITAXY; NANOCRYSTALLINE ALLOYS; OPTICAL MATERIALS; OPTICAL PROPERTIES; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS; THICK FILMS; THIN FILMS; X RAY DIFFRACTION;

ASSISTED DEPOSITIONS; AVERAGE SIZES; CRYSTALLINE STRUCTURES; GE FILMS; GE WAFERS; GREAT-ER; HIGHER INDICES; OPTICAL; POWER DENSITIES; SILICON SUBSTRATES; SYSTEMATIC CHANGES; TRANSMISSION ELECTRON MICROSCOPY IMAGES; X-RAY DIFFRACTIONS;

STRUCTURAL PROPERTIES;

EID: 55049138262     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.08.112     Document Type: Article

References (19)

1. Gilbert L.R., Messier R., and Roy R. Thin Solid Films 54 (1978) 149
2. Aguilera J.A., Aguilera J., Baumeister P., Bloom A., Coursen D., Dobrowolski J.A., Goldstein F.T., Gustafson D.E., and Kemp R.A. Appl. Opt. 27 (1988) 2832
3. Urban G., Jachimowicz A., Kohl F., Kuttner H., Olcaytug F., Kamper H., Pittner F., Mann-Buxbaum E., Schalkhammer T., Prohaska O., and Schonauer M. Sens. Actuators, A 22 (1990) 650
4. Wales J., Lovitt G.J., and Hill R.A. Thin Solid Films 1 (1967) 137
5. Donovan T.M., Ashley E.J., and Spicer W.E. Phys. Lett. A 32 (1970) 85
6. Theye M.L. Opt. Commun. 2 (1970) 329
7. Chik K.P., and Lim P.-K. Thin Solid Films 35 (1976) 45
8. Hirsch E.H., and Varga I.K. Thin Solid Films 69 (1980) 99
9. Theye M.L., Gheorghiu A., Gandais M., and Fisson S. J. Non-Cryst. Solids 37 (1980) 301
10. Khawaja E.E., Durrani S.M.A., Hallak A.B., and Sakhawat Hussain M. J. Non-Cryst. Solids 170 (1994) 308
11. Mcmarr P.J., Blanco J.R., Vedam K., Messier R., and Pilione L. Appl. Phys. Lett. 49 (1986) 328
12. Bohac P., Jastrabik L., Chvostova D., and Zelezny V. Vacuum 41 (1990) 1466
13. Desande J.C.G., Afonso C.N., Escudero J.L., Serna R., Catalina F., and Bernabeu E. Appl. Opt. 31 (1992) 6133
14. Yao X., Xiong C., Yang C., and Tong N. 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies (2006), SPIE 614908
15. Zhao X.-m. 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment (2006), SPIE 61503G
16. Tauc J. In: Nudelman S., and Mitra S.S. (Eds). Optical Properties of Solids (1969), Plenum Press, New York 123
17. Platt B.C., Icenogle H.W., and Wolfe W.L. Appl. Opt. 15 (1976) 4
18. Barnes B.T. J. Opt. Soc. Am. 56 (1966) 1546
19. Edwin R.P., Dudermel M.T., and Lamare M. Appl. Opt. 21 (1982) 878