Spot size converter with vertically tapered waveguide core fabricated by sputter etching

Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 2, 2008, Pages 5278-5280

  Kitano, Nobuaki ^a,b   Komano, Haruyasu ^a   Ishikawa, Hiroshi ^a   Maru, Koichi ^a   Tanaka, Kotaro ^a   Kashimura, Seiichi ^a   Mimura, Hidenori ^b  

^a HITACHI CABLE LTD   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Coupling loss; Spot size converter; Sputter etching; Superhigh ; Vertical taper; Waveguide

Indexed keywords

ETCHING; FABRICATION; SINGLE MODE FIBERS;

A SPOTS; COUPLING LOSS; COUPLING LOSSES; FABRICATION PROCESSES; FUNCTIONAL CIRCUITS; INCLINE ANGLES; SPOT SIZE CONVERTER; SPOT SIZES; SPUTTER ETCHING; SPUTTER ETCHINGS; TAPERED WAVEGUIDES; VERTICAL TAPER;

WAVEGUIDES;

EID: 55049137429     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.5278     Document Type: Article

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