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Volumn 47, Issue 6 PART 2, 2008, Pages 5217-5220
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Fabrication of stainless steel mold using electrochemical fabrication method for microfluidic biochip
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Author keywords
ECF method; Injection molding; SUS mold
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Indexed keywords
ABS RESINS;
ELECTRIC DISCHARGE MACHINING;
ELECTRIC DISCHARGES;
FABRICATION;
FRICTION;
INERT GAS WELDING;
PHOTOLITHOGRAPHY;
STAINLESS STEEL;
STEEL;
STEEL CORROSION;
STEEL METALLURGY;
SURFACE PROPERTIES;
SURFACE ROUGHNESS;
CONVENTIONAL PHOTOLITHOGRAPHIES;
ECF METHOD;
ELECTRICAL DISCHARGE MACHINING;
ELECTROCHEMICAL FABRICATIONS;
HIGH COSTS;
IMPRINTING PROCESSES;
LASER METHODS;
METAL SURFACES;
MICRO FABRICATIONS;
MICRO PATTERNS;
MICROFLUIDIC BIOCHIPS;
REPRODUCIBILITY;
SCALE PATTERNS;
STEP PATTERNS;
SUS MOLD;
MOLDS;
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EID: 55049114210
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.5217 Document Type: Article |
Times cited : (13)
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References (8)
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