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Volumn 39, Issue 11, 2008, Pages 1354-1355
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Porous silicon thin film as CO sensor
a
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Author keywords
CO; Gas sensor; Porous silicon
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Indexed keywords
ALUMINA;
ATMOSPHERIC PRESSURE;
CARBON FILMS;
CARBON MONOXIDE;
CHEMICAL SENSORS;
GAS DETECTORS;
SEMICONDUCTING SILICON COMPOUNDS;
SENSOR NETWORKS;
SENSORS;
SILICON;
SUBSTRATES;
SURFACES;
THICK FILMS;
THIN FILMS;
VACUUM;
VACUUM EVAPORATION;
VACUUM TECHNOLOGY;
ALUMINUM ELECTRODES;
ANODIZATION CURRENTS;
ANODIZATION TIMES;
CO;
CO SENSORS;
ELECTRIC BEHAVIORS;
ELECTRIC CONDUCTIONS;
ELECTROCHEMICAL ANODIZATION;
GAS SENSOR;
GAS SENSORS;
IN VACUUMS;
MATERIAL'S SURFACES;
SILICON THIN FILMS;
VACUUM CHAMBERS;
POROUS SILICON;
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EID: 54949157456
PISSN: 00262692
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mejo.2008.01.035 Document Type: Article |
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Times cited : (14)
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References (3)
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