Titanium Zirconium Nitride by XPS

Surface Science Spectra

Volumn 6, Issue 3, 1999, Pages 177-183

  Milošev, Ingrid ^a   Strehblow, Hans Henning ^b   Navinšek, Boris ^a   Panjan, Peter ^a  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b HEINRICH HEINE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY ALLOYS; COATINGS; DEPOSITION RATES; NITROGEN PLASMA; REACTIVE SPUTTERING; SUBSTRATES; TITANIUM ALLOYS; TITANIUM NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM COMPOUNDS;

DC REACTIVE SPUTTERING; ENERGY; HEMISPHERICAL ENERGY ANALYZER; INTERMEDIATE LAYERS; PLASMA BEAM; SPECTRA'S; STEEL SUBSTRATE; SUBSTRATE HOLDERS; WORKING PRESSURES; XPS MEASUREMENTS;

NITROGEN;

EID: 54849411268     PISSN: 10555269     EISSN: 15208575     Source Type: Journal    
DOI: 10.1116/1.1247920     Document Type: Article

References (5)

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