Relaxed germanium films on silicon (110)

Thin Solid Films

Volumn 517, Issue 1, 2008, Pages 272-274

  Wietler, Tobias F ^a   Bugiel, Eberhard ^a   Hofmann, Karl R ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Germanium; Growth mechanism; Molecular beam epitaxy (MBE); Silicon

Indexed keywords

CRYSTAL GROWTH; EPITAXIAL GROWTH; GERMANIUM; LATTICE MISMATCH; MOLECULAR BEAMS; MOLECULAR DYNAMICS; SILICON; STACKING FAULTS; SUBSTRATES; SURFACE ACTIVE AGENTS; TENSILE STRAIN;

DIRECT GROWTHS; GERMANIUM FILMS; GROWTH MECHANISM; LATTICE MISMATCHED; MOLECULAR BEAM EPITAXY (MBE); ROUGH GROWTHS; SI(100); SI(110); SI(111); STRAIN RELEASES; SUBSTRATE TEMPERATURES; THERMAL MISMATCHES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 54849405498     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.08.018     Document Type: Article

References (20)

1. Lundstrom M. Science 299 (2003) 210
2. Takagi S.-i., Toriumi A., Iwase M., and Tango H. IEEE Trans. Electron Devices 41 (1994) 2363
3. Takagi S.-i. Symposium on VLSI Technology, Kyoto, Japan, June 10-12, 2003, Digest of Technical Papers (2003) 115
4. Low T., Li M.F., Shen C., Yeo Y.-C., Hou Y.T., Zhu C., Chin A., and Kwong D.L. Appl. Phys. Lett. 85 (2004) 2402
5. Low T., Li M.-F., Samudra G., Yeo Y.-C., Zhu C., Chin A., and Kwong D.L. IEEE Trans. Electron Devices 52 (2005) 2430
6. Hull R., Bean J.C., Peticolas L., and Bahnck D. Appl. Phys. Lett. 59 (1991) 253
7. Hull R., and Bean J.C. Crit. Rev. Solid State 17 (1992) 507
8. Lee M.L., Antoniadis D.A., and Fitzgerald E.A. Thin Solid Films 508 (2006) 136
9. Horn-von Hoegen M., LeGoues F.K., Copel M., Reuter M.C., and Tromp R.M. Phys. Rev. Lett. 67 (1991) 1130
10. Wietler T.F., Bugiel E., and Hofmann K.R. Appl. Phys. Lett. 87 (2005) 182102
11. Wietler T.F., Bugiel E., and Hofmann K.R. Thin Solid Films 508 (2006) 6
12. Voigtländer B., and Zinner A. J. Vac. Sci. Technol. A 12 (1994) 1932
13. Eaglesham D.J., Unterwald F.C., and Jacobson D.C. Phys. Rev. Lett. 70 (1993) 966
14. Reinking D., Kammler M., Horn-von Hoegen M., and Hofmann K.R. Appl. Phys. Lett. 71 (1997) 924
15. Wietler T.F., Bugiel E., Ott A., and Hofmann K.R. Mater. Sci. Semicond. Process. 8 (2005) 73
16. Reinking D., Kammler M., Hoffmann N., Horn-von Hoegen M., and Hofmann K.R. Electron. Lett. 35 (1999) 503
17. Horn-von Hoegen M., Pook M., Al-Falou A., Müller B.H., and Henzler M. Surf. Sci. 284 (1993) 53
18. Wietler T.F., Bugiel E., and Hofmann K.R. Mater. Sci. Semicond. Process. 9 (2006) 659
19. Albrecht M., Strunk H.P., Hull R., and Bonar J.M. Appl. Phys. Lett. 62 (1993) 2208
20. Albrecht M., Christiansen S., Strunk H.P., Hansson P.O., and Bauser E. Sol. St. Phen. 32-33 (1993) 433