Long-travel piezomotors 'reboot' the motion-control toolbox

Laser Focus World

Volumn 44, Issue 9, 2008, Pages 89-92

  Jordan, Scott ^a  

^a NanoAutomation Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; DEGREES OF FREEDOM; DYNAMIC LINEARIZATION; ERROR SIGNALS; MOTION PATTERNS; NANO-POSITIONING; NON-TRADITIONAL; PIEZOMOTORS; VACUUM COMPATIBILITY; WAVE FORMS;

APPLICATIONS; BOOLEAN FUNCTIONS; DIGITAL ARITHMETIC; EPITAXIAL GROWTH; MOTORS; SENSOR NETWORKS;

VACUUM APPLICATIONS;

EID: 54749149328     PISSN: 10438092     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (5)

1. S. Jordan et al., Proc. 4th Int'l. Symp. Nanomfg., Cambridge, MA, 166 (2005).
2. P. Pertsch et al., ACTUATOR 2006, Bremen, Germany, 527.
3. R. Gloess, ACTUATOR 2006, Bremen, Germany, 668.
4. K. Spanner and S. Vorndran, IEEE Proc. ASME Int'l. Conf. Adv. Intelligent Mechatronics 2003, Kobe, Japan.
5. S. Jordan and H. Marth, Proc. ASPE 2007. Dallas, TX.