Laser dicing of silicon and composite semiconductor materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 394-397

  Sibailly, O ^a   Richerzhagen, B ^a  

^a Synova SA   (Switzerland)

Author keywords

Compound semiconductors; GaAs; Laser cutting; Silicon; Water jet

Indexed keywords

COMPOSITE MATERIALS; OPTICAL FIBERS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR MATERIALS; SILICON; SILICON WAFERS;

COMPOUND SEMICONDUCTORS; LASER CUTTING; WATER-JETS;

LASER APPLICATIONS;

EID: 5444266716     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529038     Document Type: Conference Paper

References (1)

1. Natalia Dushkina, ICALEO, 2002