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Volumn 352, Issue 1-4, 2004, Pages 206-209
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Kinetic crystallization behavior of SbOx thin films
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Author keywords
Crystallization kinetics; DSC; Reactive sputtering; SbOx thin films; XRD
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Indexed keywords
ACTIVATION ENERGY;
ANNEALING;
ANTIMONY COMPOUNDS;
CRYSTALLINE MATERIALS;
CRYSTALLIZATION;
DIFFERENTIAL SCANNING CALORIMETRY;
MAGNETRON SPUTTERING;
PARTIAL PRESSURE;
PRESSURE EFFECTS;
REACTION KINETICS;
STOICHIOMETRY;
CRYSTALLIZATION KINETICS;
PARTIAL OXYGEN PRESSURES;
REACTIVE SPUTTERING;
SBOX THIN FILMS;
THIN FILMS;
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EID: 5444265231
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physb.2004.07.012 Document Type: Article |
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Times cited : (4)
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References (7)
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