Volatile organic compound gas sensing using quartz crystal microbalance with inorganic films coated by pulsed laser deposition

Japanese Journal of Applied Physics

Volumn 47, Issue 1 PART 2, 2008, Pages 637-639

  Sugimoto, Hiroshi ^a   Tanaka, Hirokazu ^a   Kanno, Yoshinori ^b  

^a Sensing Laboratory Co Ltd   (Japan)

^b UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

AT cut; Inorganic films; Pulsed laser deposition; Quartz crystal microbalance; Sol gel method; VOC detection

Indexed keywords

ADSORPTION; CARBON TETRACHLORIDE; DICHLOROMETHANE; FULLERENES; GAS DETECTORS; GAS SENSING ELECTRODES; GELATION; GELS; LASERS; ORGANIC COMPOUNDS; OXIDE MINERALS; PIEZOELECTRIC DEVICES; POWDERS; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; SILICON COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SOLS; TOLUENE; VOLATILE ORGANIC COMPOUNDS;

AT-CUT; INORGANIC FILMS; QUARTZ CRYSTAL MICROBALANCE; SOL-GEL METHOD; VOC DETECTION;

COLLOIDS;

EID: 54249152399     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.637     Document Type: Article

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