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Volumn 47, Issue 4 PART 1, 2008, Pages 2028-2031
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Fabrication of vertically-aligned carbon nanotube electrodes using grid-inserted I plasma-enhanced chemical vapor deposition for chemical sensors
a
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Author keywords
Carbon nanotube; Chemical sensor; Diffusion layer; Grid inserted plasma enhanced CVD; Plasma enhanced chemical vapor deposition
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Indexed keywords
CARBON;
CARBON NANOTUBES;
CHEMICAL SENSORS;
CYCLIC VOLTAMMETRY;
DIFFUSION;
ELECTRODES;
ELECTROLYSIS;
NANOCOMPOSITES;
NANOSTRUCTURED MATERIALS;
NANOSTRUCTURES;
NANOTUBES;
PLASMA DEPOSITION;
PLASMAS;
PLATINUM;
SEMICONDUCTOR DOPING;
SENSOR NETWORKS;
SENSORS;
SURFACE DIFFUSION;
VAPORS;
VOLTAMMETRY;
ALIGNED CARBON NANOTUBES;
DIFFUSION LAYER;
DIFFUSION LAYERS;
ELECTRODE ARRAYS;
ELECTRODE SPACINGS;
ELECTRODE SURFACES;
GRID-INSERTED PLASMA-ENHANCED CVD;
PT ELECTRODES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
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EID: 54249138650
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.2028 Document Type: Article |
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Times cited : (3)
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References (10)
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