Study of the decomposition processes of (0001)AlN in a hydrogen atmosphere

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 46, Issue 45-49, 2007, Pages

  Panyukova, Uliana ^a   Suzuki, Hikari ^a   Togashi, Rie ^a   Murakami, Hisashi ^a   Kumagai, Yoshinao ^a   Koukitu, Akinori ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Ab initio; AIN; Aluminum nitride; Decomposition; Density functional theory; First principles

Indexed keywords

ACTIVATION ENERGY; ALUMINA; ALUMINUM; ALUMINUM COMPOUNDS; ATOMIC PHYSICS; ATOMS; DESORPTION; HYDROGEN; MOLECULES; NITRIDES; RATE CONSTANTS;

AB INITIO; AB INITIO CALCULATIONS; AIN; ALUMINUM NITRIDE; DECOMPOSITION PROCESSES; EXPERIMENTAL DATUM; FIRST PRINCIPLES; HYDROGEN ATMOSPHERES;

DENSITY FUNCTIONAL THEORY;

EID: 54249128375     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.L1114     Document Type: Article

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