Optical and electrical properties of organic films prepared by RF plasma chemical vapor deposition using mixed naphthalene and propane source

Japanese Journal of Applied Physics

Volumn 47, Issue 1 PART 2, 2008, Pages 794-796

  Tengku Ibrahim, Tengku Nadzlin Bin ^a   Tanaka, Kunihiko ^a   Uchiki, Hisao ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Conductivity; IR transmission; Organic films; RF plasma CVD; SCLC

Indexed keywords

ABSORPTION; CHEMICAL PROPERTIES; ELECTRIC PROPERTIES; FILM PREPARATION; FORMING; INFRARED TRANSMISSION; LATTICE VIBRATIONS; NAPHTHALENE; PLASMA DEPOSITION; PLASMA THEORY; PLASMAS; PROPANE; STRETCHING; VAPORS; WAVE PLASMA INTERACTIONS;

CONDUCTIVITY; IR TRANSMISSION; ORGANIC FILMS; RF PLASMA CVD; SCLC;

CHEMICAL VAPOR DEPOSITION;

EID: 54249089875     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.794     Document Type: Article

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