Fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximation

Wuli Xuebao/Acta Physica Sinica

Volumn 57, Issue 9, 2008, Pages 5996-6001

  Liu, Shi Yuan ^a   Gu, Hua Yong ^b   Zhang, Chuan Wei ^a   Shen, Hong Wei ^b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Deep trench structure; Effective medium approximation; Reflectivity; Rigorous coupled wave analysis

Indexed keywords

EID: 53649103411     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)